Measuring and testing – Volume or rate of flow – Proportional
Reexamination Certificate
2006-10-17
2006-10-17
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Proportional
C073S204270
Reexamination Certificate
active
07121139
ABSTRACT:
A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.
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Meneghini Paul
Shajii Ali
Smith Daniel Alexander
McDermott Will & Emery LLP
MKS Instruments Inc.
Patel Harshad
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