External volume insensitive flow verification

Details External volume insensitive flow verification External volume insensitive flow verification

2007-02-06

2007-02-06

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Fluid or fluid flow measurement

C073S001220, C073S199000, C073S861000, C073S865000, C702S113000, C702S114000, C702S115000

Reexamination Certificate

active

11090120

ABSTRACT:
A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media connecting the inlet to the vessel, an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet, at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel, and a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.

REFERENCES:
patent: 5684245 (1997-11-01), Hinkle
patent: 6955072 (2005-10-01), Zarkar et al.
patent: 2004/0261492 (2004-12-01), Zarkar et al.
MKS INSTRUMENTS, INC., Gas Box Rate-Of-Rise In Situ Flow Verifier the GBROR™, Bulletin GBROR-Aug. 1999, 6 pp.
MKS INSTRUMENTS, INC., Tru-Flow Mass Flow Verifier™ Model GBR3A, Bulletin Tru-Flo-May 2001, 4 pp.
PCT International Search Report for related Application No. PCT/US2006/07711, (2 pages).
PCT Written Opinion of the International Searching Authority for related PCT Application No.: PCT/US2006/07711, (5 pages).

Affiliated with

Also associated with

Rating

External volume insensitive flow verification does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with External volume insensitive flow verification, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and External volume insensitive flow verification will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3859306