4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Daisuke Morisawa

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Control device of substrate processing apparatus and control...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Control valve for variable capacity compressors

Valves and valve actuation – Electrically actuated valve – Including solenoid
Reexamination Certificate

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Substrate processing apparatus, history information...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2229376

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