Substrate processing apparatus, history information...

Details Substrate processing apparatus, history information... Substrate processing apparatus, history information...

2007-09-04

2007-09-04

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C700S112000, C700S121000, C702S187000

Reexamination Certificate

active

11283825

ABSTRACT:
A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information. The alarm history recording part relates history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and records the history information as third history information.

REFERENCES:
patent: 6077386 (2000-06-01), Smith et al.
patent: 6267545 (2001-07-01), Mooring et al.
patent: 6419801 (2002-07-01), Smith et al.
patent: 6805810 (2004-10-01), Smith et al.
patent: 6901306 (2005-05-01), Nakamoto et al.
patent: 6952656 (2005-10-01), Cordova et al.
patent: 7031792 (2006-04-01), Yoshimoto et al.
patent: 7113838 (2006-09-01), Funk et al.
patent: 2003/0019840 (2003-01-01), Smith et al.
patent: 2003/0093174 (2003-05-01), Nikulin
patent: 2005/0095774 (2005-05-01), Ushiku et al.
patent: 2002-110496 (2002-04-01), None
patent: 2003-503844 (2003-01-01), None

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