Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-07-26
2011-07-26
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000, C700S121000, C700S169000, C702S102000, C438S028000, C438S758000, C707S609000, C707S634000
Reexamination Certificate
active
07987012
ABSTRACT:
A control device is provided that flexibly controls a substrate processing apparatus for each product process. Four process recipes PM1to PM4are stored in a first storage unit255a. Corresponding to each of the process recipes, a high temperature, a medium temperature, and a low temperature pre-recipe are stored in a second storage unit255b. A process recipe determination unit260determines, in response to a recipe specified by the operator, a process recipe corresponding to the specified recipe from the first storage unit255a. A stage temperature acquisition unit265acquires, from the determined process recipe, a stage temperature. A pre-recipe selection unit270selects, from the three types of pre-recipes stored in the second storage unit255b, one pre-recipe corresponding to the stage temperature. Before the wafer W is deposition-processed, therefore, the PM may be well-conditioned according to the selected pre-recipe.
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Hirose Masayuki
Morisawa Daisuke
De'cady Albert
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Stevens Thomas
Tokyo Electron Limited
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