4. Optical: systems and elements
  5. Light interference
  6. Produced by coating or lamina

Claude Montcalm

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Correction of localized shape errors on optical surfaces by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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High reflectance-low stress Mo-Si multilayer reflective coatings

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Patent

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Low-cost method for producing extreme ultraviolet...

Optical: systems and elements – Mirror – With support
Reexamination Certificate

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Method and system for producing sputtered thin films with...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and system using power modulation and velocity...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-704250

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