4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Chung-Yih Chen

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Method for making a concave bottom oxide within a trench

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for switching decoupled plasma nitridation processes...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2469767

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