4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Chung-Pei Chao

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Method for prognostic maintenance in semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method for reducing capacitance in metal lines using air gaps

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2018742

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