Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-03-08
2011-03-08
Barnes-Bullock, Crystal J (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S110000, C702S184000, C702S185000, C702S190000, C706S020000, C706S021000, C706S022000, C714S026000, C714S046000
Reexamination Certificate
active
07904195
ABSTRACT:
A method for prognostic maintenance in semiconductor manufacturing equipments is disclosed. The said method comprising: collecting a plurality of raw data from the default detection and classification system for equipments, preprocessing the raw data, using the neural network model (NN model) to find a plurality of health indices, generating health information by using the principal component analysis (PCA) to identify the health indices, and using the partial least square discriminated analysis (PLS-DA) to find a health report. The health report provides the engineers with current risk levels of equipments. By the health report, the engineers can initiate prognostic maintenance and repair the equipments early.
REFERENCES:
patent: 5761383 (1998-06-01), Engel et al.
patent: 6519575 (2003-02-01), Goebel
patent: 7242995 (2007-07-01), Morgenson et al.
patent: 7401066 (2008-07-01), Beinglass et al.
patent: 7487059 (2009-02-01), Davis et al.
patent: 7536277 (2009-05-01), Pattipatti et al.
patent: 7581434 (2009-09-01), Discenzo et al.
patent: 2006/0129257 (2006-06-01), Chen et al.
patent: 2007/0067678 (2007-03-01), Hosek et al.
patent: 2008/0082197 (2008-04-01), Lacaille
patent: 2008/0141072 (2008-06-01), Kalgren et al.
patent: 2008/0312783 (2008-12-01), Mansouri et al.
Chao Chung-Pei
Chen Chin-Long
Barnes-Bullock Crystal J
Inotera Memories, Inc.
Rosenberg , Klein & Lee
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