4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Chun-Ching Tsan

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Low temperature process for forming inter-metal gap-filling...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Low temperature process for forming intermetal gap-filling...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Method and structure to improve the reliability of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method for forming anti-reflective coating layer with...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method for improved cleaning in HDP-CVD process with reduced...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Profile ID: LFUS-PAI-P-1769184

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