4. Coating apparatus
  5. Gas or vapor deposition

Christopher S. Whitesell

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Gas injectors for a vertical furnace used in semiconductor...

Coating apparatus – Gas or vapor deposition
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Method of manufacturing a semiconductor device having...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2898017

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