4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Christopher S. Ngai

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Ashable layers for reducing critical dimensions of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and apparatus for reducing copper oxidation and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Plasma treatment for copper oxide reduction

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Semiconductor device having reduced oxidation interface

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2469227

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