4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Christopher Constantine

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Dry etching method for compound semiconductors

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Embedded attenuated phase shift mask and method of making...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Etching of chromium layers on photomasks utilizing high...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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High density remote plasma deposited fluoropolymer films

Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate

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Method for remote plasma deposition of fluoropolymer films

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
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Profile ID: LFUS-PAI-P-922062

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