4. Electricity: motive power systems
  5. Open-loop stepping motor control systems

Christopher C. Chang

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Apparatus and method for processing substrates using one or...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Boron nitride/yttria composite components of semiconductor...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Boron nitride/yttria composite components of semiconductor...

Stock material or miscellaneous articles – Composite – Of metal
Reexamination Certificate

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Carbonitride coated component of semiconductor processing...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Corrosion resistant component of semiconductor processing...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Profile ID: LFUS-PAI-P-2361569

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