Apparatus and method for processing substrates using one or...

Details Apparatus and method for processing substrates using one or... Apparatus and method for processing substrates using one or...

2007-03-28

2009-12-08

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

Reexamination Certificate

active

07628574

ABSTRACT:
An apparatus and method for processing substrates uses one or more vacuum transfer chamber units to transfer some of the substrates between at least one load lock chamber unit and at least one vacuum process chamber unit.

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International Search Report and Written Opinion of the International Searching Authority for PCT application No. PCT/US07/65405, filed on Mar. 28, 2007.

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