4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Christoph Nölscher

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Alternating phase mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Exposing a semiconductor wafer using two different spectral...

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Masks for lithographic imagings and methods for fabricating...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method for determining and removing phase conflicts on...

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate

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Method for exposing a semiconductor wafer by applying...

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Profile ID: LFUS-PAI-P-2247982

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