4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Choi Dong Kim

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Method for forming a micro pattern

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of forming micro pattern in semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method of manufacturing flash memory device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-3010523

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