4. Semiconductor device manufacturing: process
  5. Repair or restoration

Chiukin Steve Lai

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Contact clean by remote plasma and repair of silicide surface

Semiconductor device manufacturing: process – Repair or restoration
Reexamination Certificate

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Contact clean by remote plasma and repair of silicide surface

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2178269

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