4. Abrading
  5. Work holder
  6. Work rotating

Chin-Kun Lin

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CMP method and device capable of avoiding slurry residues

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Method for controlling polishing process

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Polishing head with a floating knife-edge

Abrading – Work holder – Work rotating
Reexamination Certificate

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Wafer carrier gap washer

Abrading – Machine – Combined
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2780733

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