4. Electric heating
  5. Metal heating
  6. By arc

Chihiro Taguchi

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Plasma apparatus and lower electrode thereof

Electric heating – Metal heating – By arc
Reexamination Certificate

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Substrate table, production method therefor and plasma...

Coating processes – Spray coating utilizing flame or plasma heat – Nonuniform or patterned coating
Reexamination Certificate

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Substrate table, production method therefor and plasma...

Coating processes – Spray coating utilizing flame or plasma heat – Nonuniform or patterned coating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2531274

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