Substrate table, production method therefor and plasma...

Details Substrate table, production method therefor and plasma... Substrate table, production method therefor and plasma...

2006-01-12

2009-06-09

Moore, Karla (Department: 1792)

Coating processes

Spray coating utilizing flame or plasma heat

Nonuniform or patterned coating

C427S446000, C427S453000, C427S250000, C427S261000, C427S264000, C427S270000, C427S271000, C118S500000, C361S234000, C279S128000

Reexamination Certificate

active

07544393

ABSTRACT:
The susceptor of a plasma treating device, or the electrostatic chuck of a substrate table, is formed by ceramic thermal spray method. A thermally sprayed ceramic layer is pore-sealed by methacrylic resin. Resin raw material mainly containing methyl methacrylate is applied to and impregnated into the thermally sprayed ceramic layer and then is cured to thereby fill pores between ceramic particles in the thermally sprayed ceramic layer with methacrylic resin. Methacrylic resin raw material solution, which does not produce pores at curing, can complete perfect pore sealing.

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