4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Multiple layers

Chih-Hao Lin

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LPCVD furnace uniformity improvement by temperature ramp...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method for increasing polysilicon grain size

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Nitride deposition wafer to wafer native oxide uniformity...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2512562

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