4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Chien Yu

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Removal of post-rie polymer on A1/CU metal line

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for passing discrete workpiece through plural...
Reexamination Certificate

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Removal of post-RIE polymer on Al/Cu metal line

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Profile ID: LFUS-PAI-P-1472728

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