4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Multiple layers

Chie-Chi Chen

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Method of reducing the roughness of a gate insulator layer...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Photoresist stripper using nitrogen bubbler

Cleaning and liquid contact with solids – Processes – Gas or vapor condensation or absorption on work
Reexamination Certificate

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Wafer rinse tank for metal etching and method for using

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2065941

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