Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
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0.3 Micron aperture width patterning process
Bi-layer silylation process using anti-reflective-coatings (ARC)
High selectivity Si-rich SiON etch-stop layer
High selectivity Si-rich SiON etch-stop layer
Method for anchoring via/contact in semiconductor devices and de
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