4. Agitating
  5. Stirrer within stationary mixing chamber

Chia-Jui Chang

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Chemical mechanical polishing machine

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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In-situ slurry mixing apparatus

Agitating – Stirrer within stationary mixing chamber
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Method of mixing slurries

Agitating – Method
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Wafer polishing head

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-312167

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