In-situ slurry mixing apparatus

Details In-situ slurry mixing apparatus In-situ slurry mixing apparatus

1998-12-23

2000-03-14

Cooley, Charles E.

Agitating

Stirrer within stationary mixing chamber

366341, B01F 500

Patent

active

060363568

ABSTRACT:
An in-situ CMP slurry mixing apparatus. The apparatus comprises a tubular main body and a plurality of tapered plugs. The tubular main body further comprises a plurality of first tubes with a first diameter, a plurality of second tubes with a second diameter. Each tapered plug is placed in each second tube, the tips of each tapered plug are pointed in the same direction, and the tips are each oriented opposite to a flowing direction of a CMP slurry. In addition, the second diameter is larger than the first diameter, and a diameter of the base of each tapered plug is larger than the first diameter but is smaller than the second diameter.

REFERENCES:
patent: 1170807 (1916-02-01), Egan
patent: 2426833 (1947-09-01), Lloyd
patent: 3995663 (1976-12-01), Perry
patent: 4384789 (1983-05-01), Avery, Jr.
patent: 4929088 (1990-05-01), Smith
patent: 5397179 (1995-03-01), Berlin et al.

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