4. Geometrical instruments
  5. Gauge
  6. Collocating

Chia-Hung Chung

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Chamber wafer detection

Measuring and testing – Testing of apparatus
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Fault detection and classification (FDC) specification...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Wafer cassette pod equipped with position sensing device

Geometrical instruments – Gauge – Collocating
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Wafer transport pod with linear door opening mechanism

Material or article handling – Apparatus for moving material between zones having different...
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Profile ID: LFUS-PAI-P-2793427

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