Semiconductor device manufacturing: process
Chemical etching
Combined with the removal of material by nonchemical means
Inventor
active
Carbon and halogen doped silicate glass dielectric layer and...
Chemical mechanical polisher equipped with chilled wafer...
CMP process leaving no residual oxide layer or slurry particles
CMP process leaving no residual oxide layer or slurry particles
CMP process leaving no residual oxide layer or slurry particles
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