4. Semiconductor device manufacturing: process
  5. Having magnetic or ferroelectric component

Cheol-sung Hwang

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Method for forming lower electrode of capacitor

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Patent

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Three-layer lower capacitor electrode

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-430043

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