4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Charles A. Whiting

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Dual use alignment aid

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Feed-forward lithographic overlay offset method and system

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Feedback method utilizing lithographic exposure field...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Hot plate with in situ surface temperature adjustment

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Method and apparatus for adjusting a tilt of a lithography tool

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-926269

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