4. Coating apparatus
  5. Gas or vapor deposition

Chaeho Kim

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Film formation apparatus and method for semiconductor process

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Film formation method and apparatus for semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2282573

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