Cha Won Koh

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Copolymer resin, preparation thereof, and photoresist using...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Maleimide-photoresist monomers containing halogen, polymers...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Method for forming fine patterns in semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Over-coating composition for photoresist, and processes for...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Phenylenediamine derivative-type additive useful for a...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Profile ID: LFUS-PAI-P-770912

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