4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Carol J. Heenan

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Pitcher-shaped active area for field effect transistor and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Pitcher-shaped active area for field effect transistor and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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