4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

C. Richard Guarnieri

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Antireflective silicon-containing compositions as hardmask...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making printing plates
Reexamination Certificate

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Antireflective silicon-containing compositions as hardmask...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Apparatus for enhanced inductive coupling to plasmas with reduce

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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