4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Byung-Keun Hwang

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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for forming a dielectric layer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of forming a silicon nitride layer in a semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2471894

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