4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Byung-Goo Jeon

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Contact patterning method with transition etch feedback

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method of fabricating non-volatile memory device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2365640

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