4. Coating processes
  5. Coating by vapor, gas, or smoke

Byoung-Jae Park

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3-grid neutral beam source used for etching semiconductor...

Radiant energy – Electrically neutral molecular or atomic beam devices and...
Reexamination Certificate

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Atomic layer deposition apparatus using neutral beam and...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2335413

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