4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Butch Berney

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Apparatus and methods for minimizing arcing in a plasma...

Coating apparatus – Gas or vapor deposition – With treating means
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Inductively coupled plasma CVD

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Inductively coupled plasma downstream strip module

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Inductively coupled plasma downstream strip module

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for high density plasma chemical vapor deposition of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-1519493

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