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Bruce Whitefield

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Apparatus for removing photoresist edge beads from thin film...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Apparatus for wafer patterning to reduce edge exclusion zone

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Integrated process tool monitoring system for semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for removing photoresist edge beads...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging radiant energy exposure
Reexamination Certificate

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Method and control system for improving CMP process by...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1160211

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