Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Cobalt base alloy target for a magnetron cathode sputtering syst
Method of preparing indium oxide/tin oxide target for...
Process for the production of partially reduced indium oxide-tin
Sputter target for cathodic atomization to produce transparent,
Target for cathode sputtering and method of its production
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