4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Bruce Dale Ulrich

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Hard mask method for transferring a multi-level photoresist patt

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Low temperature system and method for CVD copper removal

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Patent

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Method for forming a multi-level reticle

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Method for transferring a multi-level photoresist pattern

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of fabricating high performance SiGe heterojunction...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-520646

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