4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Brian W. Messenger

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Chemical oxide removal of plasma damaged SiCOH low k...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of trench sidewall enhancement

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2422951

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