4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation sensitive product
  6. Antihalation or filter layer containing

Brian W. Herbst

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Antireflective coating for microlithography

Radiation imagery chemistry: process – composition – or product th – Radiation sensitive product – Antihalation or filter layer containing
Patent

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Structure and method for reducing thermo-mechanical stress...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1867952

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