4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Brian M. Trentman

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Forming a trench to define one or more isolation regions in...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Post plasma clean process for a hardmask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2839043

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