4. Heating
  5. Accessory means for holding, shielding or supporting work...

Brian L. Gilmore

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Methods for producing smooth wafers

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Process for metallic contamination reduction in silicon wafers

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
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Semiconductor wafer boat for a vertical furnace

Heating – Accessory means for holding – shielding or supporting work...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2902540

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