Methods for producing smooth wafers

Details Methods for producing smooth wafers Methods for producing smooth wafers

2007-12-19

2011-11-15

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

C438S691000, C438S795000, C257SE21214

Reexamination Certificate

active

08058173

ABSTRACT:
Methods for reducing the surface roughness of semiconductor wafers through a combination of rough polishing and thermally annealing the wafer.

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