4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Brent Schwab

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Apparatus for processing both sides of a microelectronic...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Equipment for UV wafer heating and photochemistry

Coating apparatus – Gas or vapor deposition – With treating means
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Equipment for UV wafer heating and photochemistry

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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HF/IPA based process for removing undesired oxides form a...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method of surface preparation

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Profile ID: LFUS-PAI-P-1154911

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