4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Brad S. Mattson

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Apparatus and method for thermal processing of semiconductor...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Inductive plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Inductive plasma reactor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Inductive plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Method and apparatus for thermal processing of semiconductor sub

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Profile ID: LFUS-PAI-P-587124

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