4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Boo-Yeon Choi

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Apparatus for transferring a wafer

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vibrating disk type micro-gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Profile ID: LFUS-PAI-P-1575364

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